Chambers, processing load-lock

A schematic of a MALDI-TOF-MS instrument is depicted in Figure 11.2b. Samples, consisting of a few microlitres of analyte solution (with or without matrix), are deposited on a MALDI target (Figure 11.2a). After the solvent has evaporated the sample plate, carrying the solidified samples, is introduced into the MALDI ionization chamber via load-lock. The ionization process takes place in a high-vacuum chamber to which the plate is introduced via a prechamber kept at a pressure lower than atmospheric. Analyte ions are then accelerated as they are formed and pumped into the TOF analyzer, where they are separated based on their mass-to-charge ratio. 

There are several types of deposition chamber configurations (Fig. 2). The batch-type system is the most commonly used, but the requirement that the system be returned or let-up to ambient pressure on each cycle can pose problems in obtaining a reproducible processing environment. The load-lock system and the in-line system allows the deposition chamber to be kept under vacuum at all times and the substrates introduced and removed through... 

Fig. 2. Vacuum processing chamber configuration (a) batch coater (b) load-lock coater (c) in-line coater (d) cluster tool (e) roU coater (batch) and (f) roU coater (air-to-air), [[ccsq]] represents the isolation valve with transfer tooling [[artl]], the motion of fixturing and [[art2]], the access door.

Load Locks - An isolation chamber that allows a process chamber to be protected from ambient conditions. 

The cluster tool system, which is used extensively in semiconductor device processing, uses a central introduction chamber from which the substrates may be moved into separate processing modules through load-locks and transfer tooling. These processing modules may... 

Deposition system, cluster-tool (semiconductor processing) A load-lock vacuum system that has random access to several processing modules from the loading/transfer chamber. 

In-line processing system, closed-ended An in-line system with a load-lock chamber on each end. Often cassettes having multiple substrates can be loaded into the load-lock and then fed through the in-line system. See also In-line processing system, open-ended. 

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