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Cell projection lithography

Cell projection lithography incorporates elements of image projection into the variable-shaped beam approach. Here, the shaped beam is created by an aperture, formed from single-crystal silicon, containing various shapes coinciding with the array of each unit cell of an integrated circuit device pattern such as the repetitive core cells of memory chips. ... [Pg.753]

Itoh, H. Tadokoro, Y. Sohda, Y. Nakayama, and N. Saitou, Cell projection colunm for high speed electron beam lithography system, J. Vac. Sci. Technol. BIO, 2799 (1992). [Pg.168]

Sohda, Y., Ohta, H., Murai, F. et al. 2003. Recent progress in cell-projection electron-beam lithography. Microelectronic Engineering 67-68 78-86. [Pg.449]

See other pages where Cell projection lithography is mentioned: [Pg.752]    [Pg.752]    [Pg.134]    [Pg.134]    [Pg.134]    [Pg.168]    [Pg.553]    [Pg.168]    [Pg.498]    [Pg.230]   
See also in sourсe #XX -- [ Pg.752 ]



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