Cameca NanoSIMS

Primary advantages of this instrument type revolve around  

The primary disadvantages associated with this instrument type concern  

The sequential mode of data collection (only selected signals are recorded) 

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The Mattauch-Herzoggeometry (Fig. 3.20) enables detection of several masses simultaneously and is, therefore, ideal for scanning instruments [3.49]. Up to five detectors are adjusted mechanically to locations in the detection plane, and thus to masses of interest. Because of this it is possible to detect, e. g., all isotopes of one element simultaneously in a certain mass range. Also fast, sensitive, and precise measurements of the distributions of different isotopes are feasible. This enables calculation of isotope ratios of small particles visible in the image. The only commercial instrument of this type (Cameca Nanosims 50) uses an ion gun of coaxial optical design, and secondary ion extraction the lateral resolution is 50 nm. 

Instruments CAMECA IMS 7f (CAMECA), ToF-SIMS (ION-TOF), Quad-SIMS 4550 (CAMECA), NanoSIMS 50 (CAMECA) SIMSLAB (VG Scientific), INA X (Specs GmbH)... 

Hillion et al. [61] reported the development of the Cameca NanoSIMS 50, a commercial instrument for the analysis of submicrometer features. This instru-... 

An example of a Magnetic Sector-based SIMS instrument that has proved effective in this area is the Cameca nanoSIMS-50. Indeed, this instrument is capable of full transmission at a mass resolution up to m/A m of 2000 (higher mass resolution obtained at the expense of transmission). This instrument also incorporates a multi-detection system and normal incidence primary ion beams that can be focused to below 50 nm. Mass resolution, along with definitions, is covered in Section 5.2.2.2. 

Figure A.8 Schematic of the Cameca nanoSIMS 50 instrument care of Cameca.

Cameca nanoSIMS 50 (NS50) 0-, Cs- Magnetic Sector 1 - < 500 u/elements 15,000 Materials Science, Biosciences Specifically designed for elemental nanoscale imaging... 

CAMECA, NanoSIMS Materials/Geology Application Booklet. Available at http // www.cameca.fr/doc en pdf/ns50 materials application nov2006 web200.pdf. Accessed December 2006. 

The Cameca ims 1280 is an ion microscope as well as an ion microprobe. That means that it can transmit direct ion images to an image detector. This capability has now been adapted for semi-quantitative and quantitative ion imaging. Direct ion imaging does not depend on the size of the primary ion beam for its spatial resolution. The new solid-state SCAPS detector has a spatial resolution of less than a micron, close to that of the NanoSIMS (see below). 

Figure 5.35 Instrumental setup of multiple ion collector NanoSIMS 50 ion microprobe. (Reproduced by permission of CAMECA, www.cameca.com.)...

Figure 18.6 Mass analyzers employed in imaging mass spectrometry research. A schematic representation of the NanoSIMS magnetic/ electric sector mass analyzer is depicted in the left-hand panel (http //www.cameca.fr/html/ product nanosims.html). A ToF mass analyzer...

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