Cabot Microelectronics

Table 14.2 gives an overview of various pads and slurries, suitable for microfabrication. The compiled list is based on the information obtained from some consumable manufacturers as well as the experience accumulated at the author s lab as of Spring 2006. Besides the large suppliers like Cabot Microelectronics, Fujimi, and Rohm Haas, smaller companies are concentrating on custom-specific developments such as Kemesys in France as well as suppliers of abrasives or dispersions, for example, Degussa AG or H.C. Starck, both from Germany. Links to some of these suppliers are provided in the reference section [19]. 

A. Prasad, Polishing pad comprising biodegradable polymer, US Patent 7 264 641, assigned to Cabot Microelectronics Corporation (Aurora, IL), September 4,2007. 

We now show some Araca SIS performance data. Figure 15.9 compares beta test removal rate data for PA and SIS on a 200 mm SpeedFAM/IPEC 472 polisher. In the experiment, SIS and PA are alternated and flow rates are randomized. Blanket TEOS is being removed with Cabot Microelectronics SS25 slurry on an ICIOOO ... 

Cabot Corporation Microelectronics Materials Division Aurora, Illinois... 

Description of SS12 slurry, Microelectronics Materials Division, Cabot Corporation, 1995. 

Cabot Corporation Microelectronics Division. Material Safety Data Sheet for Semi-Sperse 12 and 25 Aqueous Dispersions, Aurora, IL, 2000 GB Basim, BM Moudgil. J Colloid Interface Sci, in press, (2002). 

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