Automatic protection, monitoring and control of vacuum systems

2 Automatic protection, monitoring and control of vacuum systems 

The measures to be taken in order to forestall such malfunctions will be discussed in the same order  

In principle, it is not a big step from a system protected against all malfunctions to a fully automatic, program-controlled plant, though the complexity of the electrical circuits, of course, increases significantly. 

Mp Mains connection 220 V/50 Hz Smax Switching point for maximum value min Switching point for minimu m value Inlet valve 

We have to make a distinction here between electric controllers (e.g. PID controllers) with a proportional valve as actuator and mechanical diaphragm controllers. In a regulation system w/ith electric controllers the coordination between controller and actuator (piezoelectric gas inlet valve, inlet valve A/ith motor drive, butterfly control valve, throttle valve) is difficult because of the very different boundary conditions (volume of the vessel, effective pumping speed at the vessel, pressure control range). Such control circuits tend to vibrate easily when process malfunctions occur. It is virtually impossible to specify generally valid standard values. 

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See also in sourсe #XX -- [ ]

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