Atomic layer deposition chemisorption

Chemisorption denotes the situation in which an actual chemical bond is formed between the molecules and the surface atoms. A molecule undergoing chemisorption may lose its identity as the atoms are rearranged, forming new compounds that better satisfy the valences of the surface atoms. The enthalpy of chemisorption is much greater than that of physical adsorption. The basis of much catalytic activity at surfaces is that chemisorption may organize molecules into forms that can readily undergo reactions. It often is difficult to distinguish between chemisorption and physical sorption, because a chemisorbed layer may have a physically sorbed layer deposited above it. 

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