Plasma-Arc Deposition

By increasing the electrical energy in a fixed amount of gas, the temperature is raised and may reach 5000°C or higher.P i Such high temperatures produce an almost complete dissociation of the hydrogen molecules, the CH radicals, and other active carbon species. From this standpoint, arc-plasma deposition has an advantage over microwave-plasma or thermal CVD since these produce much less atomic hydrogen. 

Chromium nitride layers (fabricated by, e.g. cathodic arc plasma deposition) are interesting because of their corrosion properties as well as because of their excellent adhesion properties and fine-grained structure. They are applied for die-casting moulds where excellent edge properties are necessary [115,116] some of these layer can have a multiphase character composed of Cr(N), Cr2N, and CrNi t [117]. Sputter deposited ternary chromium nitrides such as Cr fMe (N with Me = Ti, Nb, Mo, and W additions and with grain sizes of up to 25 nm have been found [118] to show either a hardness minimum (Me = Mo, Ti) or a maximum of up to 27GPa (Me-W, Nb). 

Leng, X.Y., Chen, J.Y., Yang, P., Sun, H., Wan, G.J., Huang, N., 2003. Mechanical properties and platelet adhesion behavior of diamond-like carbon films synthesized by pulsed vacuum arc plasma deposition. Surf. Sci. 531, 177—184. 

Non-Colloidal Nanocatalysts Fabricated with Nanolithography and Arc Plasma Deposition... 

Fig. 3.5 Schematic diagram of (a) coaxial pulsed arc plasma deposition system and (b) quasi-stationary model of a generated arc plasma, /is the arc current, B is the magnetic field induced by /, and F is the electromagnetic force applied to the plasma ions and electrons. (Reprinted with permission from ref. [34]. 2000 Elsevier Science S.A.) (c) Used cathode cylinder made of palladium. The plasma is generated from the circular rim on the right side, (d) A generated arc plasma. The plasma beam accelerates towards bottom of the image. (Courtesy of Ulvac-Riko, Inc.)...

Fig. 3.6 Schematic of arc plasma deposition of nanoparticles on a catalyst support.

Kim SH, Jung C-H, Sahu N, Park D, Yun JY, Ha H, Park JY (2013) Catalytic activity of Au/ UO2 and Pt/Ti02 nanocatalysts prepared with arc plasma deposition under CO oxidation. Appl Catal Gen 454 53-58... 

Qadir K, Kim SH, Kim SM, Ha H, Park JY (2012) Support effect of arc plasma deposited Pt nanoparticles/Ti02 substrate on catalytic activity of CO oxidation. J Phys Chem C 116 24054-24059... 

Randhawa H (1988) Cathodic arc plasma deposition technology. Thin Solid Films 167 175-185... 

Randhawa H, Johnson PC (1987) A review of cathodic arc plasma deposition processes and their applications. Surf Coat Technol 31 303-318... 

Hinokuma S, Katsuhara Y, Ando E, Ikeue K, MachidaM (2013) Pd-Fe/Ce02 bimetal catalysts prepared by dual arc-plasma deposition. Catal Today 201 92-97... 

Ito T, Kunimatsu M, Kaneko S, Hirabayashi Y, Soga M, Agawa Y, Suzuki K (2012) High performance of hydrogen peroxide detection using Pt nanoparticles-dispersed carbon electrode prepared by pulsed arc plasma deposition. Talanta 99 865-870... 

Lin KL, Hwang MY, Wu CD. The deposition and wear properties of cathodic arc plasma deposition TiAIN deposits. Mater Chem Phys 1996 46 77-83. 

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