Introduction to Arc Plasma Deposition

3 Nanocatalysts Fabricated Via Arc Plasma Deposition 33.1 Introduction to Arc Plasma Deposition 

or cathodic arc deposition, has been traditionally applied for preparing dense thin films of corrosion-resistant, protective, and decorative coatings, such as TiN, TiC, and CrN [25-27], This method is usually regarded as physical vapor deposition (PVD), but it differs from other PVD methods in that energetic plasma ions condense to form dense films in APD, while in other PVD methods, it is the vapor of neutral atoms that condense [25], 

This pulsed coaxial APD has been used to fabricate multilayer structures with subnanometer thickness control [34-36] without the need of filters, such as curved 

In the case of powder-type catalyst supports, the powder is constantly stirred for effective dispersion. 

In the case of thin-fllm type catalyst supports, no stirring is needed. (Reprinted with permission from ref. [38]. 2009 Springer Science+Business Media, LLC.) 

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