Aluminum phosphide analysis

While the spatial resolution of AES, XPS and SIMS continues to improve, atomic scale analysis can only be obtained by transmission electron microscopy (TEM), combined with energy dispersive X-ray spectroscopy (EDX) or electron energy loss spectroscopy (EELS). EDX detects X-rays characteristic of the elements present and EELS probes electrons which lose energy due to their interaction with the specimen. The energy losses are characteristic of both the elements present and their chemistry. Reflection high-energy electron diffraction (RHEED) provides information on surface slmcture and crystallinity. Further details of the principles of AES, XPS, SIMS and other techniques can be found in a recent publication [1]. This chapter includes the use of AES, XPS, SIMS, RHEED and TEM to study the composition of oxides on nickel, chromia and alumina formers, silicon, gallium arsenide, indium phosphide and indium aluminum phosphide. Details of the instrumentation can be found in previous reviews [2-4]. 

Another model was proposed by Lauer and co-workers [70]. These authors coated nickel phosphide-coated aluminum diskettes with 20-mm-thick DLC films by RF sputtering of graphite in methane, the same quasi-commercial procedure used by Marques. They measured the depth profile of the coatings hydrogen content by the same nuclear reaction analysis (viz. H/ N(alpha gamma)/ C) as that used by Terranova et al. [67]. Then they... 

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