Ultralarge scale integrated circuits

As indicated above, the goal in recent years in the ultralarge-scale integrated-circuit (ULSI) industry has been to reduce contamination on surfaces to below the level detectable with state-of-the-art equipment. For economic and environmental reasons, this method had to be replaced by one referred to as just clean enough. This requires that action-reaction relationships be identified between contaminants and... 

As can be deduced from the frequent mention of dielectric constants in sections about properties of CVD polymers in this review, a majority of CVD polymers are targeted towards low dielectric constant interconnect applications in ultralarge scale integrated circuits (ULSI). The urgent need to develop a suitable material and process for this application can be sensed by the sheer number of papers published in this area. For an in-depth understanding, the reader is referred to some excellent review articles in literature. "" ... 

T. Homma, Low Dielectric Constant Materials and Methods for Interlayer Dielectric Films in Ultralarge-Scale Integrated Circuit Multilevel Interconnects Mater. Set Eng., 1998,23,243. 

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