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TOP-DOWN NANOTECHNOLOGY SOFT LITHOGRAPHY

Within the last decade, comparatively inexpensive and scaleable tchniques known as soft lithography have been the focus of much development. Patterning of a substrate is afforded by using a master elastomeric stamp that contains a nanostructured pattern, known as a relief on its surface. Contrary to photolithography, the resolution of the final pattern is not limited by light diffraction, but only depends on the [Pg.342]

In order to improve the stamping resolution of the elasomeric stamp, there have been recent improvements in both the stamp and molecular inks e.g., alkylthiols, silanes). In particular, traditional PDMS exhibits a relatively high elasticity that limits possible relief linewidths on the other hand, small molecular weight inks exhibit diffusion during patterning. Hence, the following complementary strategies have been employed  [Pg.345]

Using a combination of the above modifications has now extended nanocontact printing to well below the 30nm regime - even as low as [Pg.345]

A general benefit of DPN over other soft lithographic techniques is the ability to pattern nanostructures (including biological materials) by a single step without crosscontamination, since the desired chemistry occurs only in a specifically defined location of the substrate. [Pg.346]

The mechanism of ink transport from the AFM tip to substrate is currently an item of controversy. Recent models suggest that a meniscus forms between the tip [Pg.346]


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