Thickness-shear-mode acoustic wave sensor

Yang, M. Thompson, M., Multiple chemical information from the thickness shear mode acoustic wave sensor in the liquid phase, Anal. Chem. 1993, 65, 1158-1168... 

Thompson M., Kipling A. L., Duncan-Hewitt W. C., Rajakovic L. V., and Cavic B. A., Thickness shear-mode acoustic wave sensors in the liquid phase. Analyst, 116, 881-890, 1991. 

Other theoretical approaches relevant to applications in the gas phase and dealing with thickness-shear mode acoustic wave quartz sensors are presented in [213], [232]-[237],... 

A piezoelectric mass sensor is a device that measures the amount of material adsorbed on its surface by the effect of the adsorbed material on the propagation of acoustic waves. Piezoelectric devices work by converting electrical energy to mechanical energy. There are a number of different piezoelectric mass sensors. Thickness shear mode sensors measure the resonant frequency of a quartz crystal. Surface acoustic wave mode sensors measure the amplitude or time delay. Flexure mode devices measure the resonant frequency of a thin Si3N4 membrane. In shear horizontal acoustic plate mode sensors, the resonant frequency of a quartz crystal is measured. 

A quartz crystal sensor chip was bonded with a microfluidic glass chip for acoustic wave detection (see Figure 7.46). The sensor was operated in the thickness-shear mode (TSM). This has allowed rat heart muscle cell contraction to be studied based on the measurement of the resonant frequency changes [133]. 

Devices based on piezoelectric crystals, which allow transduction between electrical and acoustic energies, have been constructed in a number of conrigurations for sensor applications and materials characterization. This cluqtter examines those devices most commonly utilized for sensing a( licatithickness-shear mode (TSM) resonator, the surface acoustic wave (SAW) device, the acoustic plate mode (APM) device, and the flexural plate wave (FPW) device. Each of these devices, shown schematically in Figure 3.1, uses a unique acoustic mode. 

Figure 3.1 Schematic sketches of the four types of acoustic sensors, (a) Thickness-Shear Mode (TSM) resonator (b) Surface-Acoustic-Wave (SAW) sensor, (c) Shear-Horizontal Acoustic-Plate-Mode (SH APM) sensor, and (d) Flexural-Plate-Wave (FPW) sensor.

QCM can be described as a thickness-shear mode resonator, since weight change is measured on the base of the resonance frequency change. The acoustic wave propagates in a direction perpendicular to the crystal surface. The quartz crystal plate has to be cut to a specific orientation with respect to the ciystal axis to attain this acoustic propagation properties. AT-cut crystals are typically used for piezoelectric crystal resonators[7]. The use of quartz crystal microbalances as chemical sensors has its origins in the work of Sauerbrey[8] and King [9] who... 

J.W. Grate, S.N. Kaganove, V,R, Bhethanabotla Examination of mass and modulus contributions to thickness shear mode and surface acoustic wave vapour sensor responses using partition coefficients. Pp. 259-83. 

If the wave propagates through the substrate, the wave is called a bulk wave. The most commonly used BAW devices are the thickness shear mode (TSM) resonator and the shear-horizontal acoustic plate mode (SH-APM) sensor. The TSM, also widely referred to as a quartz crystal microbalance (QCM), is the best-known and simplest... 

---