Thickness polyimides

Fig. 4. Examples of emission spectrometry as a diagnostic monitoring tool for plasma processing, (a) The removal of chlorine contamination from copper diode leads using a hydrogen—nitrogen plasma. Emissions are added together from several wavelengths, (b) The etching and eventual removal of a 50-p.m thick polyimide layer from an aluminum substrate, where (x ) and (° ) correspond to wavelengths (519.82 and 561.02 nm, respectively) for molecular CO2...

Figure 5. Dissipation factor D at 1 MHz vs. time at a specified temperature for a 1-ftm thick polyimide film.

A 0.125-mm-thick polyimide substrate named Kapton HN (Good-fellow), an epoxy resin (CW2400) obtained from RS Components and self-adhesive washers of 5 mm internal diameter (19.6 mm2 of internal area) are used to construct the working electrodes. 

The three-electrode potentiostatic system is schematised in Fig. 36.1. Working electrodes are made on 5 x 5 cm2 supports of 0.125-mm-thick polyimide substrate named Kapton HN (Goodfellow). The kapton slide is cleaned with ethanol and after drying, it is covered with gold by... 

The device consisted of a 75 -pm thick polyimide foil containing microstructured slits (250 pm wide and 45 mm long) sandwiched between the working and counter electrodes (Scheme 4.34). The reaction took place inside the microchannels that were in contact with both electrodes. To maintain a constant reaction temperature, a heat exchanger block was also mounted above the working electrode. This microreactor-based electrolysis afforded 98% product selectivity, which was higher than that for common industrial processes (about 85%). 

Thin layers (100-1000 A) of polyimide on the substrate were prepared for external reflectance IR spectra and to measure the average depth of modification, which will be discussed in detail. Figure 2 displays the ER IR spectra of the 870-A-thick polyimide and the modified samples in the range of 1900-1300 cm-1 which provide the most useful information for this re-... 

In figure 7 we show Infrared-Reflection Absorption data for a thin polyamic acid film (a), a thin polyimide film (b) (after curing the PAA film of spectra a) and a thick (d > 10 nm) polyimide film (c) on a polycrystalline silver surface. Transmission and reflection infrared absorption spectra of thick (d > 1000 nm) spun-on polyamic acid and polyimide films have been reported previously [22-24], Salem et al. [2] presented in their pioneering paper the infrared transmission spectra for vapor deposited polyamic acid and polyimide. Except for the relative intensities between the individual absorption bands, our results for a thick polyimide film (Fig. 7c) are identical to those for spun-on and vapor deposited films, showing the unresolved symmetric and asymmetric (strong) vc Q stretches between 1700-1800 cm 1, the v (l,4-CgH4) ring... 

An electrochemical microflow reactor consisting of a plate-to-plate electrode configuration mounted in a nonconducting housing has been developed. As shown in Figure 7.23, a 75 im thick polyimide foil between the working electrode and the counter electrode defines a unique distance. This polyimide foil contains microstructured slits (250 im wide). 

Poly[4,5-bis(trimethylsilyl)phthalaldehyde] has been used in a similar all-dry process to etch a 2 pm-thick polyimide film [440]. 

The present device is schematically shown in Figure 6.3.15(a). A gate electrode consisting of a Cr adhesion layer and an Au layer is deposited through a shadow mask in a vacuum evaporator on a 13-pm thick polyimide film. Then, polyimide precursors are spin-coated to form 500-mn thick gate dielectric layers. A 50-mn thick pentacene is deposited, and then 50-mn thick Au drain and source electrodes are evaporated. The channel length L and width W of the FETs are 100 [im and... 

The importance of the role of acetone in the corona treatment atmosphere is shown by the data in Table 7.9. In this case, an FEP film at a thickness of 13 pm was treated in an atmosphere of acetone (3.1% by volume) and nitrogen. The treated film was heat-sealed to a 25 pm thick polyimide (PI) film, both corona-treated and untreated, at different temperatures. Untreated polyimide produced a weaker bond while FEP treated in air (versus acetone/N2) yielded almost no bond strength. 

For these sensors, 2-nm thick Ti and 20-nm thick Au layers were deposited on 50-prn thick polyimide films by vacuum evaporation. Next, a 50 nm pentacene layer was deposited, again by vacuum sublimation. The pentacene layer was then doped p-type by exposure to a 1% solution of ferric chloride in water. 

MICRONS Thick POLYIMIDE DIELECTRIC 5-MICRON THICK ALUMINUM CONDUCTORS... 

The work of Pinnau and co-workers with asymmetric films was the first to show dramatic time-dependent gas transport properties (127,128). Later, Pfromm and co-workers showed similar behavior in free-standing polyimide and polysul-fone films (129). Figure 34 shows that for a 0.5-/xm thick polyimide film, the N2 permeability decreases by approximately 50% over a 6000-h period, while the He/N2 selectivity increases by approximately 25% in the same time period. The decrease in permeability is not nearly as dramatic for the thick films. Rezac and co-workers (130) and McCaig and co-workers (131) saw similar effects in pol5dmide/ceramic and polycarbonate/ceramic composite membranes, respectively. Chung and Teoh observed the same effects in asymmetric hollow fiber gas separation membranes (132). 

External conductor sizing charts for 2 oz. external conductors in a 1.78 mm (0.07 in.) thick polyimide board. 

Plane chart for a 1.78 mm thick polyimide PWB.This is a chart that describes the reduction in trace temperature rise as a function of the distance from a single copper plane.This chart is used with the internal and external baseline charts. 

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