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Thermopneumatic Valve

A thermopneumatic valve is a type of micromachined active valve operated by the volumetric thermal expansion of a heated gas or heated liquid in a sealed chamber [1]. [Pg.3309]

Thermopneumatic Valve, Fig. 1 Thermopneumatic actuator consisting of a corrugated p + silicon diaphragm as the residual stress relaxation structure and a microheater for thermopneumatic actuation [4]... [Pg.3310]

Thermopneumatic Valve, Fig. 2 Time response of the static deflection of thermopneumatic actuators with a corrugated and a flat diaphragm [4]... [Pg.3310]

Piezoelectric Valves Piezo/PZT in Microfluidics Pneumatic Valves Soft Photolithography Thermomechanical Valves Thermopneumatic Valves... [Pg.1633]

A thermopneumatic valve typically consists of a move-able valve diaphragm, a valve seat, and a resistive heater in a sealed cavity. While electrical power is applied to the resistive heater, the initial volume of gas in the sealed chamber expands. Using the volumetric change of the heated gas in the cavity, the diaphragm structure... [Pg.2064]

See other pages where Thermopneumatic Valve is mentioned: [Pg.1144]    [Pg.441]    [Pg.460]    [Pg.536]    [Pg.959]    [Pg.1068]    [Pg.1403]    [Pg.2701]    [Pg.2814]    [Pg.2824]    [Pg.3019]    [Pg.3026]    [Pg.3088]    [Pg.3309]    [Pg.3309]    [Pg.3310]    [Pg.3310]    [Pg.3310]    [Pg.234]    [Pg.667]    [Pg.264]    [Pg.274]    [Pg.334]    [Pg.594]    [Pg.644]    [Pg.828]    [Pg.1710]    [Pg.1853]    [Pg.1898]    [Pg.2064]    [Pg.2064]   
See also in sourсe #XX -- [ Pg.234 ]

See also in sourсe #XX -- [ Pg.2064 ]



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