Thermomechanical valve

A thermomechanical valve is a device that regulates fluid flow (either gas flow, liquid flow, or slurry flow) by using an actuator which deforms under different temperatures to open, close, or partially obstruct various channels. 

Thermomechanical Valves, Fig. 1 (a) Schematic diagram of a straight, clamped-clamped beam after buckling (b) illustration of the thermal buckling of a square membrane... 

Thermomechanical Valves, Fig. 3 A typical normally closed thermal expansion microvalve... 

Thermomechanical Valves, Fig. 6 A paraffin-actuated microvalve described in the text, (a) Schematic of the cross section of the microvalve (b) microscope... 

Thermomechanical Valves, Fig. 7 Schematic of a nonnally closed thennal bimorph-actuated valve... 

Thermomechanical Valves, Fig. 10 A Si — Ni bimorph-actuated microvalve with thermal isolation comb regions, (a) Thermal isolation comb regions (b) photograph of the microvalve... 

Thermomechanical Valves, Fig. 11 Bimetallically actuated gate microvalves... 

Thermomechanical Valves, Fig. 17 SMA pinch microvalve in (a) de-energized close state and (b) actuated open state... 

Thermomechanical Valves, Fig. 18 A gate microvalve actuated by an SMA wire at (a) open position and (b) closed position... 

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