SIMS Instrument Capability Table

The following table provides a cursory list of selected parameters approximating varions standalone SIMS instrument capabilities (available commercially or otherwise), along with areas these are most commonly applied, and any additional comments. The omission of specific instruments is in no way reflective of their capabilities or otherwise. These are listed in the order of Quadrupole-based SIMS instruments. Magnetic Sector-based SIMS instruments, Time-of-Flight-based SIMS instruments, and a Hybrid instrument These instruments are listed alphabetically within each sub-gronp. Additional information can be acqnired from the respective vendors (see Section A.8.12). 

Instrument Primary Ion Source/s Secondary Ion Mass Analyzer 

Mass range/for the Analysis of Mass Resolution (m/Am) Primary Application Area (Application in Others Possible) Additional Comments 

1- 500 u/elements Unit Materials Science Atomica design, LMIG optional 

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The type of information provided by the techniques listed in the tables also varies greatly. Many spectroscopic techniques give qualitative and/or quantitative elemental composition. The vibrational techniques, however, generally provide information on the molecular structure. SIMS, especially in the static mode (SSIMS or TOFSIMS), can yield information on molecular structures and even orientation of monolayers [5-10]. This is particularly useful for the study of the absorption of coupling agents on metals or to determine the effects of plasma treatments on polymer surfaces [11]. TOFSIMS instruments also have capabilities for determining the two-dimensional distributions of elements or molecular species at the surface, similar to the capabilities (for elements only) offered by AES and EDXA or WDXA. 

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