Semiconductor Surface Chemistry

Department of Chemical Engineering, Stanford University, Stanford, CA 94305, USA 

5 (jum, in a transistor made in 2006 this value is well under 100 nm. At such a small scale, surface or interfacial properties can dominate the behavior of the device. 

The study of semiconductor surface structure and surface chemistry was actually begun several decades ago together with the advent of surface analytical techniques. Many of the earliest surface science studies examined semiconductors. However, for 

Several excellent reviews are available concerning both surface structure of semiconductors and surface chemistry of semiconductors, including Refs. [5-23]. Here, a comprehensive review is not attempted and the reader is referred instead to those references. The focus of this chapter is primarily on the surface chemistry of silicon and germanium, as these are the two most heavily studied systems. We strive to provide insight into the chemical reactivity of these two surfaces, and hence 

We begin by reviewing the surface structure of the most commonly studied crystal faces of these materials. We will then briefly discuss the oxidation of both silicon and germanium, then review the passivation of silicon and germanium surfaces. In addition, we explore the reactivity of Si, Ge, and to a lesser extent GaAs and InP, toward various organic molecules that can be used to functionalize the surface and impart new properties to the semiconductor. 

---

Physics of energy levels in metals and semiconductors Surface chemistry of intermediate radicals on surface and adsorption Spectroscopy of acceptor particles, gives energy levels for electrons Hydrodynamics of flow of solution, transports ions to surface... 

The strategy to modify surface states, and thus the Vg and SRV, is based on interaction of chemically grafted molecules with these states. The key is to find molecules that will modify the semiconductor surface chemistry in a way that involves the surface states. In this respect, the origin of the surface states should be considered. Intrinsic surface states originate from the termination of the crystal bulk and the breaking of chemical bonds at the surface, whereas extrinsic surface states originate from crystal imperfections, such as missing surface atoms, line defects, or... 

---