Secondary electrons, in electron

Silvis-Cividjian, N., C.W. Hagen, L.H.A. Leunissen and R Kruit. 2002. The role of secondary electrons in electron-beam-induced-deposition spatial resolution. Microelectron Eng 61-62 693-699. 

Another by-product of secondary electron in electron microscopic analysis is X-ray fluorescence. When an electron from the inner shell is emitted from the atom during the secondary electron emission, and another electron from the outer shell falls to its vacancy, the released energy might be emitted as X-ray to balance the total energy of the atom. Figure 5.6a and b schematically illustrates the emission processes of the K-line and L-line X-rays from a titanium atom, respectively, where Eg, 1, 2, and 3 are the electron potential energies... 

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