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Scanning tunneling microscopy film thickness

Ellipsometry was used hy Giannoulis et al. [9] to study fihn thicknesses of therapeutic sOicon-based microdevices under development. In situ characterization of the growth of electroactive films of oxides and hydroxides of transition metals has been done with scanning tunneling microscopy (STM), atomic force microscopy (AFM), and intermittent contact atomic force microscopy (ICAFM). Shrinkage and enhanced thicknesses of films can be measured with these methods. Films of iridium oxide, nickel oxides, and polyaniline were studied here. [Pg.6409]

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See also in sourсe #XX -- [ Pg.49 ]



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