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Scanning spreading resistance microscopy

Scanning force microscopy (SFM) 87 Scanning mode 155 Scanning probe microscopy (SPM) 94 Scanning spreading resistance microscopy (SSRM) 171... [Pg.230]

SSRM Scanning Spreading Resistance Microscopy Manipulation of Molecules and Nanostructures. Wiley-VCH,... [Pg.1804]

Scanning Spreading Resistance Microscopy (SSRM), like SCM, can provide carrier concentration maps to a spatial resolution of around 2 nm. The sample may be a conductor or a semiconductor. Information is, however, derived by measuring the electrical conductivity or resistivity of a sample sandwiched between an atomically sharp tip and a conductive back plate. This is useful for measuring concentrations of active n- and p-type dopants if present at concentrations greater than lel6 atoms/cm. ... [Pg.331]

See other pages where Scanning spreading resistance microscopy is mentioned: [Pg.77]    [Pg.821]    [Pg.112]    [Pg.146]    [Pg.149]    [Pg.153]    [Pg.90]    [Pg.171]    [Pg.595]    [Pg.2958]    [Pg.337]    [Pg.595]    [Pg.261]    [Pg.268]    [Pg.77]    [Pg.821]    [Pg.112]    [Pg.146]    [Pg.149]    [Pg.153]    [Pg.90]    [Pg.171]    [Pg.595]    [Pg.2958]    [Pg.337]    [Pg.595]    [Pg.261]    [Pg.268]    [Pg.153]    [Pg.26]    [Pg.305]   


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Scanning spreading resistance microscopy SSRM)

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