Residual gas analyzer

Residential sheathing Residual fuel Residual fuel oil Residual gas analyzers... 

The central transport chamber is an 80-cm-diameter stainless steel vessel, and is pumped by a 1000-1/s turbomolecular pump, which is backed by a small (501/s) turbomolecular pump to increase the compression ratio for hydrogen, and by a 16-m /h rotating-vane pump. UHV is obtained after a bake-out at temperatures above 100°C (measured with thermocouples at the outside surface) of the whole system for about a week. A pressure in the low 10 " -mbar range is then obtained. With a residual gas analyzer (quadrupole mass spectrometer, QMS) the partial pressures of various gases can be measured. During use of the system, the pressure in the central chamber is in the low 10 -mbar range due to loading of samples. Water vapor then is the most abundant species in the chamber. 

The deposition chamber is a cylindrical vessel with a diameter of 50 cm and a length of 80 cm. At about 5 cm from the arc outlet, silane can be introduced via an injection ring (7.5-cm diameter) that contains eight holes of 1-mm diameter each. The distance between arc outlet and substrate is 38 cm. The substrates are heated via the substrate holder, of which the temperature can be controlled between 100 and 500°C. Samples can be loaded via a load lock equipped with a magnetic transfer arm. The substrate can be optionally RF-biased. A residual gas analyzer... 

Mass spectrometry is also extremely useful as a process monitor. Less sophisticated residual gas analyzers (RGA) operating on the principles of mass spectrometry are available for these purposes and for end point detection. For the etching of Si 128-130), poly-Si 130), silicon nitride 130), and Si02 (729), SiF (m/e=85) has been shown to be effective for end-point detection. In addition, (m/e=14) is useful for nitride 129,130) in leak tight systems, while O (m/e =16), CO (m/e =44) and Si" " (m/e=29) are useful for oxide (757). Because of the general nature of mass spectrometry as a diagnostic tool, it should be applicable to etching studies of metals and other semiconductor materials. 

Residual gas analyzers -for vacuum systems [VACUUM TECHNOLOGY] (Vol 24)... 

Typical residual gas analyzers employ electron impact to generate ions and a quadrupole mass filter to obtain the mass-to-charge ratio of these species. Mass ranges for these analyzers vary 2-80 atomic mass units for small units 1-500 on larger, more expensive gas analyzers. Electron impact ionization of the gas is achieved using a hot filament as the source. Many instruments are equipped with a second filament which can be switched into use in the event of a failure of the first. When a robust detector of moderate sensitivity is needed, a... 

Dry Ice, 112-113 liquid nitrogen, 109-110 liquid nitrogen boil-off, 193, 195 slush baths, 110-112 Residual gas analyzers, 142-143 Ring seal, 253-255 Rough vacuum apparatus, 118-119 definition of, 118 Rubber ... 

The residual gas analyzer sensing head is generally supplied on an ultrahigh-vacuum flange which can be readily accommodated on most metal vacuum apparatus. 

O Hanlon, J. F., 1980, A Users Guide to Vacuum Technology, Wiley, New York. This book is a good source of information on vacuum gauges and residual gas analyzers. 

An extensive and detailed coverage of the MS of expls in general has been documented (Ref 163). Volatile constituents of Comp A-3, Comp B, pressed TNT and cast TNT were surveyed with a residual gas analyzer MS (Ref 40). The mass spectra of all possible TNT (except for 3,4,5-TNT) and DNT isomers in the vapor phase were obtained as a function of ionizing voltage (Refs 65 84). The use of membrane inlet systems for the separation of TNT vapor in trace vapor detection is described and an analysis of the membrane inlet system for quadrupole mass spectroscopy is presented (Refs 95 113). Estimations of the vapor pressure of TNT were made mass spectrometrically in the range of 50—... 

MS has long been used for the detection of low molecular weight gases. Hence, the devices are sometimes called residual gas analyzers and are typically magnetic sector or quadrapole instruments. The mass spectrometer is often considered to be the best GC detector since it can usually provide unambiguous identification of eluted components. A variety of mass spectrometers have been used as... 

Apparatus. The experiments were performed in a vacuum system consisting of a preparation chamber and an analysis chamber separated by a gate valve. The preparation chamber was pumped by a 150 1/s turbo pump to a base pressure of lxl0 mbar. A quadrupole residual gas analyzer (RGA) was connected to the pumping line of the chamber. It did not have a direct line-of-sight to the specimen. Gases could be admitted to the chamber as desired through a variable leak valve. In the preparation chamber, the specimen could be mounted in a heatable support where it could be irradiated with an electron gun. A transfer device allowed the specimen to be moved to the analysis chamber without exposure to air. 

Residual Gas Analyzer. The residual gas or partial-pressure analyzer is a form of ionization gauge in which the positive ions are mass analyzed either by a conventional sector-mass-spectrometer arrangement (employing a permanent magnet) or by a quadrupole-mass-spectrometer arrangement (which requires no magnet). The ion current is amplified either... 

An instrument that integrates ES with EC is shown in Fig. 3 a residual gas analyzer is also available in this apparatus for temperature-programmed desorption (TPD) but the use of such technique is beyond the scope of the research described here. 

The continuous operation of LCVD could be controlled, in principle, by the strict controls of the flow rate, the system pressure, and the discharge power. The addition of a residual gas analyzer in each pumping system is advantageous in detecting abnormality in gas flow, occurrence of leakage, etc. The addition of more sophisticated diagnostic devices, such as an optical emission spectrometer, in-line XPS, etc., is often counterproductive because the stability of performance and the maintenance requirement cycle of these devices do not match those for the continuous mode operation of LCVD. The information obtainable by these devices... 

As indicated earlier, Berry s treatment of the ion trajectories in the omegatron indicates that harmonic effects do not exist Many investigators have used and studied the omegatron mass spectrometer as a leak detector partial pressure analyzer and as a residual gas analyzer" ... 

An AEI MSIO Residual Gas Analyzer was used to record mass spectra of permanent gases. Spectra of other gaseous products were obtained using an AEI MS12 Instrument. 

Mass Spectrometer. The mass spectrometer used for this study was a Process Control Analyzer, Model 270, manufactured by the Aero Vac Corp. This residual gas analyzer is completely housed in a mobile cabinet and requires only electrical power for its operation. 

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