Neutrals, high energy

The secondary Ion extraction optics should Include an Immersion lens above the sample surface to maximize secondary Ion transmission from the sample surface to the mass spectrometer. An electrostatic analyzer should again be used to filter out high-energy neutral particles and photons from the secondary Ion beam. Energy analysis of the secondary Ions Is generally not necessary, but can be used to vary the amount of fragmentation observed In the mass spectrum (9). 

The positive ions produced in various ways are accelerated towards the substrate in the electric field formed by the substrate applied to negative high voltage and the earthed parts of the equipment. The portion of the film material ions is usually very low (up to 2%). However, there are many high energy neutral vapour particles... 

M. Larsson, H. Danared, J.R. Mowat, P. Sigray, G. Sundstrom, L. Brostrom, A. Filevich, A. Kallberg, S. Mannervik, K.G. Rensfelt, S. Datz Direct high-energy neutral-channel dissociative recombination of cold... 

In non-reactive sputter deposition, the properties of the film depend to a large extent on the gas pressure, which determines the thermalization of the reflected high energy neutrals and the sputtered species. The energy of the species striking the surface of the growing film affects the development of the columnar morphology, density, and residual film stress. 

High energy neutrals (sputtering) High energy neutral species formed by neutralization... 

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