Recognition, Evaluation and Control of Some Plasma Processing Hazards

Safety precautions are necessary for the protection of the environment, community and co-workers, and the primary responsibility of starting and running a safe operation lies with the very people who are going to do the work. In every step of the design, installation and implementation of a process, procedure or piece of equipment, it is essential to think about the hazards. 

SEMATECH has developed an EH S Roadmap which is a priority list of issues that need to be resolved to assure the semiconductor industry meets its goal of an environmental friendly industry (Fig. 1). 

As the use of more and more chemicals are restricted by law (ozone depleting) and occupational health exposure standards are reduced (glycol ethers) both researchers and engineers need to consider the impact of process operations on the community, environment, employees, and consumer. 

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David Rainer and Lisa Brooks, co-authors of Chapter 7, Recognition, Evaluation and Control of Some Plasma Processing Hazards, provide an overview of the plasma process as well as the various physical and chemical hazards associated with plasma processing. 

Recognition, Evaluation and Control of Some Plasma Processing Hazards... 

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