Reactor with Basketlike Tumbler

If the material has a high density and soft bulk property, the external surface, on which LCVD and the collision with other surface occur, could be damaged considerably, including the damage to the once-deposited LCVD layer. If the internal surface, such as the inner surface of a tube-like substrate, is the main concern, the damage to the external surface is not a serious problem. On the other hand, if the external surface of small-size substrate is the main concern that 

Since a relatively large volume reactor is employed, e.g., 200-500 liters for basketlike tumbler reactors, it is nearly mandatory to charge sufficient number of substrate, which makes experiments with small number of substrates difficult and inefficient. On the other hand, the total number of substrates that can be charged in the basketlike tumbler is restricted by other factors of a tumbler reactor. A smaller reactor by this principle is difficult, as will be made clear by the same reason described below. 

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