Raster, definition

Each "tool" has a unique footprint or wear pattern that is a function of its diameter. This wear pattern is eonvolved with the topographic map of material to be removed to create the raster pattern with a dwell time at eaeh raster position. In some implementations, these dwell time methods work very well. A faetor of 10 improvement in surfaee figure is common for the ion beam and MRP methods but there are some definite issues as well. 

The key specifications of EL3 are shown in Table I. EL3 combines a high current variable shaped beam column with a dual deflection system (42). Maximum beam size is 4 jam x 4 jam and shapes smaller than this are available in 0.1 m increments. Spot edge definition is better than 0.2 jam. A highly accurate but relatively slow magnetic deflection coil deflects the beam in a raster sequence to the center of an array of 75 jim subfields. The variable... 

Definition Qf chronograph) 383 84 (Definition of term "raster ) 46)Merriam-Webster s (1961)... 

The information content of a video signal can be broken down into basic component definitions consisting of (1) luminance level, (2) monochrome level, (3) chromaticity value, (4) raster coordinates, (5) point image, (6) line image, and (7) picture element. Various recording, delivery, and playback systems can be developed through the use of the following. 

SIMS instrument designs based around FT-ICR have been able to replicate many of the advantages displayed by such mass filters when applied in mass spectrometry. As an example, mass resolution values of 385,000 have been demonstrated via the single ion method (see Section 5.1.1.1.1) albeit using the 50% definition (Smith et al. 2011). This was reported for molecular secondary ions produced via Cgo primary ion impact. Also demonstrated was the possibility of imaging the organic ions to unprecedented sensitivity and detection limits. This was carried out by synchronizing the pulsed Cgo beam raster with the FT-ICR mass filter detection electronics, i.e. the microprobe method (see Section 5.3.2.2). 

We will compare the relative total intensity with the depth of real geometrical structures. Figure 9.49 shows the observed depth as function of the raster geometry of the mask. The observed depth of a geometrical structure increases progressively with increased width of perforations, if the period i is constant. The structural depth decreases noticeably at small widths of perforation. However, the observed depth does not remain constant if the period i varies at a constant transmission ratio (i.e. o/i = const.). The area dependent definition of the ratio of transmission does not allow it. If only the transmission controls the UV-penetration depth, it would be expected that the observed structural depth is constant for a constant ratio of transmission which corresponds to a constant relative total intensity. 

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