Big Chemical Encyclopedia

Chemical substances, components, reactions, process design ...

Articles Figures Tables About

Range Distributions from SRIM

Disk File Name = SRIM Outputs Arsenic in Silicon Ion = Arsenic [33], Mass = 74.92 amu [Pg.72]

Energy Elec. Nuclear Range straggling straggling [Pg.72]

Biersack, J.P. Calculation of projected ranges in analytical solutions and a simple general algorithm. Nucl. Instrum. Meth. 182/183, 199 (1981) [Pg.74]

Eckstein, W. Computer Simulation of Ion-Solid Interactions. Springer, Berlin Heidelberg New York (1991) [Pg.74]

Kawamoto, I Universal expressions of projected range and damage distributions. Appl. Phys. Lett. 48,257 (1986) [Pg.75]

Target Density = 2.3212E+00 g/cmS = 4.97706+22 atons/cm3 Target Composition [Pg.72]

Fig. 7.8. The ion implantation range distribution for 40 keV Sb in Si (from Monte Carlo SRIM simulation)... Fig. 7.8. The ion implantation range distribution for 40 keV Sb in Si (from Monte Carlo SRIM simulation)...
See other pages where Range Distributions from SRIM is mentioned: [Pg.72]    [Pg.73]    [Pg.72]    [Pg.73]    [Pg.72]    [Pg.73]    [Pg.72]    [Pg.73]    [Pg.124]    [Pg.356]    [Pg.192]    [Pg.356]    [Pg.192]   


SEARCH



Range distributions

SRIM

© 2024 chempedia.info