Projected range distribution

There is left a probability 1 — N 5R J da that no collision occurs. In this event, we clearly get a contribution [1 — N 5R J da] F fx — 5x, E,t ) to the total probability for the projected range, x. Equating these two terms to the initial distribution yields ... 

That these ideas have some merit is indicated by the work of Hart, Dunlap, and Marsh . These investigators deposited a fraction of a monolayer of copper onto a silicon wafer and then monitored the position and concentration of the copper using Rutherford backscattering. After deposition, the copper, which was then located on the immediate surface, was bombarded with 20 keV Ne ions to a fluence sufficient to sputter 90 A of Si from the surface. The Rutherford backscattering spectrum, which was taken after this bombardment, showed that the copper was uniformly distributed to a depth of 600 A which corresponds roughly to the projected range of the Ne" " ions, i.e., the depth of the altered layer was approximately equal to the projected range of the Ne. 

Kido, Y., Kawamoto, I Universal expressions of projected range and damage distributions. Appl. Phys. Lett. 48,257 (1986)... 

Many different designs are available, the major difference among them being in feed-distribution methods and plate configurations. Operating capacities range from 1 to 3 m of feed/h/m" of projected horizont area [0.4 to 1.2 gal/(min ft)]. 

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