Process microengineering

The aminosilane coating PF8TAS has been characterized on Si(lOO) and on microengines. The AFM analysis on coated Si(lOO) confirms that the process does not generate particles. Ellipsometry measurements conducted on coated Si(lOO) in controlled humidity... 

M.-S. Han, B.-K. Min, S.J. Lee Modeling gas film formation in electrochemical discharge machining process using a side-insulated electrode. Journal of Micromechanics and Microengineering 18 (2008), 045019. 

C. Lin, G. Lee, B. Chang, and G. Chang, A new fabrication process for ultra-thick microfluidic microstructures utilizing SU-8 photoresist. Journal of Micromechanics and Microengineering, 12(5), 590-597, 2002. 

EMM can also be effectively utihzed for fabrication of several of microfeatures for a wide range of microengineering applications such as fuel processing, aerospace, heat transfer, microfluidics, and biomedical applications. These microdevices have to often withstand high stresses at elevated temperatures during their service in different applications such as microcombustors, electrochemical reactions required at elevated temperatures in microreactors, and also in microthermal devices. For biomedical applications, microcomponents are to be made of biocompatible materials and... 

A desktop chemical factory (DCF) can be deployed as a pilot plant to produce a small scale of chemicals. Many patents on novel microreactors and microengineering processes related with the DCF system have been published. Although one of the earliest patents on new micro structured device was proposed in 1977, the number of patents has been consistently increased from the early 1990s [14]. The main contents of these patents were the micro-fabrication and assembly of device, tabletop systems, fluidic platforms, united system, and process controls. Most of the patents were focused on how to control microreaction processes. 

Combining the advantages of microengineered membranes with increased shear at the membrane surfaces is the basis of rotating membranes ( ROME-process ) [53, 54, 62], Mean droplet sizes are in the range of the membrane pore size. 

Recent developments in the area of microengineered structures for chemical processing [24] made possible to manufacture meshes of various materials (i.e., steel, silicon nitride), by techniques such as standard mask lithography, or laser interference lithography [56,57]. 

Figure 8.7 The use of trapped oxide to decrease topography due to conformal coatings in the PolyMUMPS process while preserving the strength of the anchors. (Used with permission from Raji Krishnamoorthy Mali, Thomas Bifano, and David Koester, A design-based approach to planarization in multilayer surface micromachining, J. Micromechanical Microengineering 9, pp. 294-299 [1999].) [17]. See color plate section.

Yao, D. and B. Kim, Simulation of the filling process in micro channels for polymeric materials. Journal of Micromechanics and Microengineering, 2002. 

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