Process equipment terms Links

Cluster Tools. Many cleanroom processes can be combined into what is termed acluster tool. These are discrete functional modules linked to a central robot that allows the semiconductor device manufacturer to purchase one process tool that may perform dry etching, metallization and passivation in one piece of equipment. By 1995, cluster tools are expected to make up greater than 60% of the semiconductor thin-film processing equipment market. P ]... 

The General Subject Index links subject terms, such as reactions, processes and equipment, classes of substances, and biochemical and biological subjects, including plant and animal species, with their corresponding CA abstract numbers. 

Regarding the potential commercial use of millistructured reactors, one of the main aspects to be considered is its possible integration in industrial processes. In this context, not only the design of the reactor but also the way in which it interacts with the different equipment linked to it in terms of mass and heat balances should be taken into account. For the latter purpose, process simulation software such as Aspen HYSYS, Aspen Plus, PROMAX, UNISIM, and/or... 

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