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Polyimide for dielectric layers

PFMB can be used to prepare aromatic polyimides that display solubility in ketone, ether, and polar aprotic solvents. This unusual solubility can be utilized in die facile preparation of thin films that display anisotropy in their structures and properties. The anisotropy in the optical properties of the films makes them promising candidates for use as compensation layers in liquid-crystal displays. Their low dielectric constants and CTEs in combination with their outstanding thennal and thermooxidative stabilities make diem candidates for dielectric layers in microelectronics applications. [Pg.368]

However, fluorocarbon compounds might be of considerable interest for LB-layer fabrication. Their dielectric and mechanical characteristics and thermal and chemical stability are not inferior to those of polyimides, and highly developed synthesis technology makes it possible to create systems with various predictable properties. Such films have been found to demonstrate a high degree of perfection and excellent dielectric characteristics.69,70... [Pg.102]

Polyimides have been widely used in the advanced microelectronics industry such as passivation or stress-relief layers for high-density electronic packaging, interlayer dielectric layers for wafer-level semiconductor fabrication, or alignment layers for liquid crystals in advanced liquid crystal display devices (LCDs) owing to their outstanding thermal, mechanical and good insulation properties with low dielectric constant, good adhesion to common substrates and superior chemical... [Pg.80]


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Dielectric layers

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