Polycrystalline silicon stability

Han PG, Wong H, Poon MC (2001) Sensitivity and stability of porous polycrystalline silicon gas sensor. Colloid Surface Physicochem Eng Aspect 179 171-175... 

To avoid catalytic interaction of the analyte with a heater made of noble metal, the films are frequently coated with a thin, chemically inert layer of SiO. Such passivation very often serves as a support for further functional layers in top-down microelectronic technologies. It should be noted that the passivation of electrode materials allows a reduction in requirements relating to their thermodynamic stability. In particular, the indicated approach is used in micro-hotplate fabrication. As a result most micro-hotplate designers consider polycrystalline silicon doped with boron or phosphorus impurities to be a very appropriate material for making heaters and temperature sensors because, with capsulation covering, it is stable up to 1,000 °C (Panchapakesan et al. 2001 Hwang... 

In heterogeneous solid membranes, the active (selective) material is mixed in the form of a powder with a suitable binder (e.g., silicone rubber) and cast in the form of thin membranes. In this case, the difficulties associated with single-crystal fabrication are avoided, and better stability is obtained than in membranes compressed from polycrystalline powder. 

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