Polishing Pad Characteristics

FIGURE 4.6 Values of /I (tribological mechanism indicator) describing boundary lubrication for an IC1400 K-groove pad at 25% solids and partial lubrication for an ICIOOO flat pad at 12.5% solids (from Ref 6). 

FIGURE 4.7 Stribeck curves for polishing using different pad materials and groove patterns (from Ref 6). 

Analyses of Stribeck curves, Preston s coefficient, COF, and tribological mechanism indicator correlating with each other help to understand the polishing mechanisms. Such an analysis not only helps in the process development but also provides useful feedback to the pad development manufacturers. 

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