Plasma in MicroChannel

Gas plasma, a fourth state of matter, is a neutral composition of ions, electrons, radicals, and photons that is synthesized by applying energy to a gas at atmospheric pressure or within a vacuum. Gas plasma can be used to enhance the functionality of microdevices for various biological and chemical applications. The effects of plasma in microchannels are regulated by parameters such as the type of gas, power intensity, chamber pressure, and duration of the treatment. 

Plasma in MicroChannel, Fig. 1 Schematic of the oxygen plasma treatment of a PDMS substrate... 

Plasma in MicroChannel, Fig. 2 Schematic of the process used to fabricate microchannels through a plasma-induced bonding process... 

Plasma in MicroChannel, Fig. 3 Schematic of a radio frequency plasma treatment chamber... 

Plasma in MicroChannel, Fig. 4 External parameters that influence the quality of surface plasma treatment... 

Plasma in MicroChannel, Table 1 Comparison of the bonding results with RIB process parameters for bonding of plasma-treated surfaces. Bonding 1 metric based on permanently bonded area after immediate contact (no bonding = 0 whole area bonded = 10). Bonding 2 metric based on permanently bonded area when 3 days have passed after immediate contact... 

Various research findings on the effects of plasma treatment on microchannels have reported improved surface characteristics within microfluidic channels. Researchers have also been able to adapt plasma treatment technologies to develop novel applications in the field of engineering. Furthermore, applications of plasma in microchannels include the development of on-chip light sources and the fabrication of micropattems and gradients for cell adhesion studies. 

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