Physical properties, MEMS-based

Hot-wire anemometers ( micro/nano anemometers) have been developed for a wide spectrum of applications from experimental fluid mechanics to aerospace engineering to measure physical parameters such as temperature, flow rates, and shear stress. The advent of microelectromechan-ical systems (MEMS) and nanoscale thermal sensors has provided an entry point to microfluidics, biomedical sciences, and micro-circulation in cardiovascular medicine. These MEMS and nanoscale devices are fabricated with semiconductor-based sensing elements which harbor the physical property of a resistor and have the dimension of one-tenth of a strand of hair. On the basis of the heat transfer principle, these resistant elements are heated by the Joule effect due to the passage of electric current. As the... 

---