Photolithography workers

General health outcomes such as nausea, arthritis, headaches, rashes, and sore throats were reported more often by photolithography workers than others. These analyses were prevalence-based rather ftian incidence-based as used in the reproductive portion of the study. 

Photolithography (photolith) materials include solvent systems for delivery of critical films ofphotolith materials. Special bonding agents such as hexamethyldisihzane are essential to the photolith process and pose special hazards to workers. Development of photolith materials is moving... 

Pioneering work in this area has been performed by Kramer and co-workers using topographically patterned surfaces fabricated by photolithography and chemical etching techniques. The resulting patterns were long trenches,... 

SFIL has been developed over the past decade by Willson and co-workers it replaces the photomask in traditional photolithography with a quartz mold, and replaces complex optical steppers with molding tools. Figure 8(a) summarizes the procedure used. The prepolymer is irradiated and cross-linked through the transparent mold. Release of the mold reveals the relief stracture in the cross-linked polymer. A residual layer ("scum") connects the molded features in the imprint resist to one another. A breakthrough etch removes the scum layer and completes the pattern transfer step. The unconnected features of imprint resist can then direct further elaboration of the substrate. Figure 8(b) shows an example... 

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