Photolithographic processes chemical steps

The mixer was made by wet-chemical etching of glass substrates, following a photolithographic step, yielding channels for the fluid flow and for the electrodes. The electrodes (100 Q resistors) were made by an electron-beam evaporation process generating thin metallic films in the etched channels [92], Holes were drilled into the cover plate for inlet and outlet connection. Fusion bonding was used to seal the plates. 

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