Phosphosilicate glass

2 Phosphosilicate glasses. The formation of phosphosilicate glasses by thermal treatment of gel precursors has been studied by P MAS NMR (Clayden et al. 2001). The dried gels were found to consist of siloxane frameworks containing trapped 

All peaks other than the marked isotropic peaks are spinning side bands. From Dupree et al. (1987, 1988) by permission of MacMillan Magazines Ltd and the Society of Glass Technology. 

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BSG = borosilicate glass PSG = phosphosilicate glass MOS = metal oxide semiconductor. 

For instance, doped phosphosilicate glasses used in planarization cannot be heated above their flow temperature of 725°C. Likewise, after a layer of aluminum is deposited, subsequent temperatures cannot exceed 380°C because spiking and the formation of hillocks would occur rapidly (see diffusion barrier in the following chapter). The factor of time at a given temperature is just as important, as it will influence phenomena, such as diffusion and dissolution. In the planning of a CVD process, the sequence of events and the thermal budget are essential considerations. 

NHE OCP ONO OPS PCD PDS PL PLE PMMA PP PP PS PSG PSL PTFE PVC PVDF normal hydrogen electrode (= SHE) open circuit potential oxide-nitride-oxide dielectric oxidized porous silicon photoconductive decay photothermal displacement spectroscopy photoluminescence photoluminescence excitation spectroscopy polymethyl methacrylate passivation potential polypropylene porous silicon phosphosilicate glass porous silicon layer polytetrafluoroethylene polyvinyl chloride polyvinylidene fluoride... 

Abbreviations used. TEOS, tetraethylorthosilicate PSG, phosphosilicate glass BHF, buffered HR 2.3% HF + 2.1%HN03. 

E. H. Snow and B. E. Deal, Polarization phenomena and other properties of phosphosilicate glass films on silicon, /. Electrochem. Soc. 113, 263, 1966. 

Figure 4.21. Si spectra of alkaline-earth phosphosilicate glasses of composition 0.3MO-0.05Si02-0.65P205, showing evidence for Si in 6-fold and possibly 5-fold coordination. From Yamashita et al. (2000), by permission of Elsevier Science.

Figure 12.18. Si MAS NMR spectra of lead phosphosilicate glasses (After Prabakar etal., 1991).

Phosphosilicate glass films have been obtained with low-temperature oxidation of hydrides ... 

The details on the fabrication procedure can be found in Liu et al. [2]. In the first step, phosphosilicate glass sacrificial thin film is deposited on top of the silicon substrate. This thin film is patterned to form mesas on which... 

Li H., Nogami M. Ordered mesoporous phosphosilicate glass electrolyte film with low area specific resistivity. Chem. Commun. 2003 236-237... 

In the cases of phosphosilicate glasses (Bioglasses), the analysis of the correlation coefficients obtained for the linear correlations between the theoretical Si 8iso and the mean Si-O-T angle (R 0.55, 0.62, and 0.89 for Q, Q, and Si species, respectively) clearly indicates that the Q" distribution of the Si species is controlled by the nonrandom distribution of Na and Ca atoms in the glass [89, 95]. The worst correlations coefficients have to be ascribed to the irregular distributions of Ca ions around the different Si Q" species (its concentration is maximal around the and... 

G. Lusvardi, D. Zaffe, L. Menabue, C. Bertoh, G. Malavasi, U. Console, In vitro and in vivo behaviour of zinc-doped phosphosilicate glasses. Acta Biomater. 5,419- 28 (2009)... 

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