PCOR-SIMS Method

Within this method, the variability in recorded secondary ion intensities resulting from chemically reactive primary ions over the transient region is assumed to arise from the variations in the concentration of the respective primary ions within the substrate. This effect extends over a depth equivalent of 2Rp to 2.5Rp, where R is the projected range of the respective primary ion within the substrate of interest. The modification of the substrate also has the effect of adjusting sputter rates. 

The PCOR-SIMS approach attempts to correct for both the secondary ion intensity and sputter rate variations noted over the associated transient and/or interfacial region by, first, deriving the actual sputter rates and RSFs at each point of the respective depth profile for each specific matrix as analyzed under a specific set of conditions and then, secondly, applying the derived sputter rates and RSFs on a point-by-point basis to the substrate being examined such that the appropriate corrections are applied. The first step is often aided using specifically fabricated reference materials that have been fully characterized, often by various other cross-referencing techniques. 

Owing to its initial success, the PCOR-SIMS method has since been extended to multiple different secondary ions from differing substrate types whether sputtered by Cs+ or 0+ primary ions over depths ranging from tens to thousands of nanometers in depth. In all cases, the derived results appear consistent to those relayed by MEIS, NRA, ERDA, and other cross-referencing techniques inclusive 

There is no one end all be all technique, i.e. one technique that provides all possible combinations of the information of interest. This stems from the fact that each source/signal combination provides different forms of information, with the technique in question specialized toward maximizing the respective information content contained within. The techniques covered in this section are subdivided according to whether photons, electrons, or ion emissions are recorded. These include  

The photon spectroscopies (those that analyze photon emissions) of  

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