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Overview of the Technique SEI, BEI, CCI

Scanning Electron Microscopy (SEM) is a powerful tool for the surface observation of samples. The scanning of a small electron probe on the surface of the sample induces the emission of several signals. The main imaging mode used in SEM is based on the detection of the secondary electrons (called SEI for Secondary Electrons [Pg.67]

As SEMs are versatile instruments for relatively low costs, they are largely available in laboratories in the field of biology and materials science. Developed in the 1940 s, it has undergone many changes regarding the ease of use, the electron guns and optics, the resolution improvement and the development of specific modes such as transmission (STEM), low-voltage, environmental or variable-pressure, etc. [Pg.68]


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