Optical MEMS

IEEE/LEOS International Conference on Optical MEMS (20-23 Aug. 2002), IEEE, Lugano, 2002, 101-102. 

Design technology Digital, analog, optical, MEMS... 

IBM has become one of the key approaches in micro/nanofabrications for various applications, such as nano-optics, MEMS, and nanomanufacturing. 

Examples of Optical MEMS Biosensors Integrated Mach-Zehnder Interferometer... 

Ollier E (2002) Optical MEMS devices based on moving waveguides. IEEE J Sel Topics Quantum Electron 8 155-162... 

This paper describes two types of applications for optical MEMS (1) optical systems on a chip, and (2) monoUthic integration of a large array of optomechanical devices. Specific examples will be given for each type of appUcation. 

Integrable Micro-Optics MEMS Actuators Opto MEMS... 

Zhang, Q., et al. A Two-Wafer Approach for Integration of Optical MEMS and Photonics on Silicon... 

A key factor for high performance adaptive optical system is the capability to dynamically control either the physical layout or the refractive indices of the optical components. Recent advancements in optical MEMS technology [3] has provided significant functionality and flexibility to the former of these (e. g. optical switching and reconfigurable mirror arrays). Traditional techniques for... 

Figure 1.14 Examples of optical MEMS devices that have been fabricated in the SOIMUMPS process. When the square pad attached to the mirror is pushed down with a microprobe, the mirror is lifted up. The torsion hinges allow the mirror to move up while at the same time being attached to the silicon layer. When the mirror is in the upright position, the square pad attached to the locking mechanism can be lifted and its teeth engaged into the holes in the mirror, locking the mirror in its upright position. (Reprinted with permission from Prof Ash Parameswaran, School of Engineering Science, Simon Fraser University, Burnaby, BC, Canada.)...

One of the earliest optical MEMS devices used the electrostatic deflection of an array of cantilever beams in combination with a galvo scanner to form a projection display system as shown in Figure 4.1 [1]. The cantilever beams were metal-coated silicon dioxide, but they could also be formed in polysilicon using the MUMPS process or in single crystal silicon in the SOIMUMPS process. 

Another source of topography on the mirror surface resulted from residual stress-gradients in the polysilicon film after it was released, as described previously in Section 4.5 on obtaining flatness in optical MEMS devices. Here it was found that a post-fabrication ion bombardment step could be used to increase the radius of curvature due to residual stress gradients, as shown in Figures 8.8 and 8.9 [19]. 

JOEL A. KUBBY is a Professor of Electrical Engineering in the Baskin School of Engineering at the University of California, Santa Cruz. Prior to this, he was an Area Manager with the Xerox Wilson Center for Research and Technology, and a Member of the Technical Staff at the Webster Research Center in Rochester, New York. He has led a six-company industrial research consortium under the National Institute of Standards and Technology s Advanced Technology Program (ATP) to develop a new process for optical MEMS, and he has more than 80 patents. 

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