Near surface analysis with energetic

Near Surface Analysis with Energetic Ion Beams... 

It has been shown that energetic ion beams may be utilized to "nondesthuctively" determine the profile of composition vs. depth in a wide variety of near surface situations. The major difficulties and limitations of the method have been delineated with descriptions of alternative methods applicable in difficult cases. The advantages of using these techniques as complementary to other surface analysis methods has also been pointed out. 

RBS is the most commonly used non-destructive nuclear method for elemental depth analysis of nm to gm thin films. It involves measurement of the number and energy distribution of energetic ions (usually protons or He ) elastically back-scattered within the near-surface region of solid targets. From such measurements it is possible to determine, with some limitations, both the atomic mass and the content of elemental target constituents as a function of depth below the surface. 

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