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Nano-/microelectromechanical systems MEMS

Hot-wire anemometers ( micro/nano anemometers) have been developed for a wide spectrum of applications from experimental fluid mechanics to aerospace engineering to measure physical parameters such as temperature, flow rates, and shear stress. The advent of microelectromechan-ical systems (MEMS) and nanoscale thermal sensors has provided an entry point to microfluidics, biomedical sciences, and micro-circulation in cardiovascular medicine. These MEMS and nanoscale devices are fabricated with semiconductor-based sensing elements which harbor the physical property of a resistor and have the dimension of one-tenth of a strand of hair. On the basis of the heat transfer principle, these resistant elements are heated by the Joule effect due to the passage of electric current. As the... [Pg.1274]

See other pages where Nano-/microelectromechanical systems MEMS is mentioned: [Pg.6]    [Pg.151]    [Pg.222]    [Pg.289]    [Pg.1830]    [Pg.164]    [Pg.50]    [Pg.389]    [Pg.15]    [Pg.298]    [Pg.118]    [Pg.442]    [Pg.5]   
See also in sourсe #XX -- [ Pg.164 ]



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