Microelectromechanical system fabrication techniques

Fortunately, PVDF and its copolymers are compatible with silicon integrated circuit (1C) fabrication and lend themselves to microelectromechanical systems (MEMS) techniques to provide transducers in close physical proximity to electronics through the integration of transducers directly on the IC chip. Previous efforts have integrated polymer ultrasonic transducers with electronics [77, 78]. Silicon has been micromachined to improve transducer performance, air backed and epoxy backed transducers fabricated on sihcon have been demonstrated [79, 80]. 

Simultaneous recordings of exocytotic events from single cells or cell clusters can be accomplished by microfabricated MEAs with individually addressable microelectrodes, which can be fabricated by the most widely used microelectromechanical system (MEMS) techniques, involving the use of... 

Our communications infrastructure relies heavily on advanced materials chemistries. From the manufacturing processes used to fabricate optical fiber cables to molecular beam epitaxy techniques for the creation of nanoscale heterostructures that enable many optical devices, innovations in materials chemistry have played a role. An example of a recent technological achievement that relates to optical communications systems is the MEMS-based (microelectromechanical system) Lambda Router. The Lambda Router is an optical system developed at Lucent Technologies for switching narrowly focused... 

The acronym MEMS stands for microelectromechanical systems, which have lateral dimensions in the range of 1-1000 pim. MEMS are also sometimes referred to as microsystems technology (MST) and the fabrication techniques as micromachining. MEMS devices are fabricated using techniques that were originally developed for the microelectronics industry but that have been adapted and extended to... 

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