Micro-drilling technique

P. Brett, L. Reyes, and J. Blanshard, "An automatic technique for micro-drilling a stapedotomy in the flexible stapes footplate," Proc. IMechE, Part H, 209(4) 255-262,1995. 

Micro- (and even nano-) electrode arrays are commonly produced with photolithography and electronic beam techniques by insulating of macro-electrode surface with subsequent drilling micro-holes in an insulating layer [136, 137], Physical methods are, however, expensive and, besides that, unsuitable for sensor development in certain cases (for instance, for modification of the lateral surface of needle electrodes). That s why an increasing interest is being applied to chemical approaches of material nanostructuring on solid supports [140, 141],... 

Laser welding and drilling Laser beams can be used in industrial applications requiring exceptionally high precision, such as miniature assemblies and micro techniques in the electronic industry or spinnerets for the artificial fiber industry. The laser beam melts and joins the work pieces. 

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