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COATED METAL

Rutherford backscattering spectrometry is the measurement of the energies of ions scattered back from the surface and the outer microns (1 micron = 1 pm) of a sample. Typically, helium ions with energies around 2 MeV are used and the sample is a metal coated silicon wafer that has been ion implanted with about a... [Pg.1827]

See other pages where COATED METAL is mentioned: [Pg.539]    [Pg.1630]    [Pg.1630]    [Pg.1634]    [Pg.1641]    [Pg.1642]    [Pg.1642]    [Pg.2487]    [Pg.2]    [Pg.8]    [Pg.13]    [Pg.32]    [Pg.36]    [Pg.37]    [Pg.62]    [Pg.71]    [Pg.114]    [Pg.123]    [Pg.126]    [Pg.134]    [Pg.147]    [Pg.148]    [Pg.161]    [Pg.164]    [Pg.173]    [Pg.210]    [Pg.210]    [Pg.233]    [Pg.248]    [Pg.249]    [Pg.249]    [Pg.251]    [Pg.295]    [Pg.354]    [Pg.355]    [Pg.356]    [Pg.367]    [Pg.404]    [Pg.414]    [Pg.418]    [Pg.431]    [Pg.439]    [Pg.441]    [Pg.450]    [Pg.451]    [Pg.464]    [Pg.510]    [Pg.517]    [Pg.523]    [Pg.527]   
See also in sourсe #XX -- [ Pg.350 ]



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