Surface Roughness Measurement

In the UV most of the materials of interest, e.g. Si, polysilicon, SiGe, GaAs, and other semiconductor materials, are strongly absorbing this enables surface-sensitive measurements. Surface roughness, native oxide covering, material composition, and structural properties can be analyzed. 

The friction of this Ti alloy was remarkably steady over a range of rotation speeds up to 5500 rpm, increasing somewhat at the lower speeds, and for a range of loads, from 4 to 18 N at a constant sliding speed. The measured surface roughness of the worn surfaces was 2.1 pm Sa, where Sa is the surface arithmetic roughness. 

The friction coefficient for X-750 appears to trend upward as the environment is changed from vacuum to pure N,to a 4% dilute H2 mixture, as shown in Fig. 7. The measured surface roughness of the worn surfaces was 3.8 pm Sa. 

Contact methods of measuring surface roughness (see Chapter 7) are not likely to be successful with uncured rubber because of its softness. It is unlikely that roughness needs to be known very precisely and a simple method has been given by Orlovskii et al139. The volume of a disc is calculated using the overall thickness measured on top of any irregularities and compared to the true volume measured by a liquid displacement method. 

We assume that a robust process requires a higher deposition rate at the bottom of the trench. Conformal deposition is not acceptable due to a non-zero standard deviation in the plating rate from that predicted by the deterministic model. The difference in plating rate from the top to bottom must overcome the standard deviation. This randomness may be related to a measured surface roughness of a blanket deposit, which likely depends on additive chemistry, the substrate, and the film thickness. 

Relevant US and EN standards for response-type devices measuring surface roughness are ASTM E 1082 (2012) (for measurement of vehicular response), ASTM E 1215 (2012) (trailers used), ASTM E 1448 (2009) (for calibration of systems) and CEN EN 13036-6 (2008). 

Fotir granular products were employed as test materials. Their particle properties are listed in Table 1. Note that the wall friction angle listed in Table 1 was measured by using Jenike shear tester based on the similarity between the test pipeline internal condition and the shear plate (i.e. a piece of bright mild steel plate). Such similarity was determined manually, not by measuring surface roughness. Since the effect of wall friction on the slug performance is very complicated, further research is needed to address this issue. 

Ai, X. and Cheng, H.S., 1994, "A Transient EHL Analysis for Line Contacts With Measured Surface Roughness Using Multigrid," ASME Journal of Tribology, Vol.116, pp.549-558. 

Xu, G., and Sadeghi, F., 1996, Thermal EHL Analysis of Circular Contacts With Measured Surface Roughness, ASME Journal of Tribology, Vol.l 18, pp.473-483. 

Ai, X and Cheng, H S, 1993, "A transient EHL analysis for line contacts with measured surface roughness using multigrid technique", ASME Journal of Tribology, Paper No 93-Trib-56. 

The following international standards are also frequently referenced in surface roughness International Standards Organization ISO 1302 2002 and Australian Standards AS ISO 1302-2005. These standards measure surface roughness with specifying parameters in various ratings. 

For all comparison studies, analysis was conducted at 3 locations. This is labeled as A , B and C on Figure 1. In the case of measuring surface roughness the average of 3 readings obtained at each location was used, rounded to the nearest significant figure. 

A Wyko NT-2000 non-contact surface profilometer was used to measure surface roughness of the contact blanks, the treated sample surfaces, and the sample free surfaces. In addition, a Hitachi S-3400N scanning electron microscope was utilized to capture images of sample surfaces. 

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