Low-activation-energy resists

It should be pointed out that the solubility change in all chemically amplified resists (CARs) occurs only in the dark reaction during the PEB. Some of the CARs such as acetal and ketal systems have low activation energy, so deprotection can occur with low-temperature PEBs or even at room temperature. In the absence of thermally driven diffusion such as in acetal and ketal resist systems, BARCs must be used for resists with such low PEB temperatures, which are significantly lower than the soft bake temperature, in order to control reflectivity issues associated with standing waves. 

Carbon films of high conductivity with low activation energy that are very stable, chemically inert, and highly corrosion resistant have a wide range of applications, e.g., as standard resistors, electrode coatings, stripper foils for accelerators, interconnects in circuits, and corrosion-resistant coatings as listed below [191]. 

The conclusion regarding the fact that constant current conductivity involves not all microcrystals of the sample is proved by results of measurements of electric conductivity in sintered ZnO films in case of alternating current (Fig. 2.10). The availability of barrier-free ohmic pathways is proved by a low value of initial resistivity in sintered samples ( 1 - 5 kOhm) in addition to exponential dependence of electric conductivity plotted as a function of inverse temperature having activation energy 0.03 - 0.5 eV, which coincides with ionization energy of shallow dope levels. The same value is obtained from measurements of the temperature dependence of the Hall constant [46]. 

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