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Liquid phase silylating agents

Typical vapor phase silylating agents used in top surfaee imaging systems include dimethylsilyldimethylamine (DMSDMA), trimethylsilyldimethylamine (TMSDMA), and trimethylsilyldiethylamine (TMSDEA). Typical liquid phase silylating agents used in top surfaee imaging systems inelude 1,1,33,5,5-hexamethylcyclotrisilazane and bis(dimethylamino)dimethylsilane with N-methyl-2- pyrrolidone (NMP) as a diffusion promoter. Typical polymer resins include polyvinyl phenol and novolac/diazoquinone polymer resins. [Pg.393]

Liquid phase silylation process can use silylation agents such as HMCTS (11) which can also crosslink the silylated region and prevent flow of the image... [Pg.339]

See other pages where Liquid phase silylating agents is mentioned: [Pg.194]    [Pg.794]    [Pg.170]    [Pg.124]    [Pg.3]    [Pg.212]    [Pg.54]    [Pg.76]    [Pg.344]    [Pg.238]    [Pg.28]    [Pg.2]   
See also in sourсe #XX -- [ Pg.794 ]



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Liquid agent

Phase agents

Silylating agents

Silylation agents

Silylation liquid phase

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