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Layers random semiconductors

The common gases used for CVD synthesis of SiO are silane and oxygen, dichlo-rosilane (SiCl H ) and nitrous oxide (N O), or tetraethylorthosilicate (SiCOCjHj) ). SijN has high electrical resistance and dielectric strength and is suitable as a passivating layer and storage capacitor in dynamic random access memory. The Si source for SijN can be SiH, SiCl or SiCl H, the nitride source being NHj or N +Hj. The common precursor for the CVD of SijN in the semiconductor industry is SiCljHj -i-NHj and the deposition is operated at a temperature between 750 and 900 °C and a pressure of 25-115 Pa [5]. [Pg.104]

Fig. 1.8 Diagram of a metal-oxide-semiconductor field effect transistor (MOSDEET). It includes a capacitor-fike gate composed of a metallic electrode, a dieleetrie and a semiconductor layer. Voltage switching at the gate generates either no current flow or current flow between the source and drain terminals this corresponds to a sequence of 0 and 1 bits in the binary system. Transistors with MOSFET stmcture are the most commonly used active components of DRAMs (dynamic random access memories) in computers and intelligent cards... Fig. 1.8 Diagram of a metal-oxide-semiconductor field effect transistor (MOSDEET). It includes a capacitor-fike gate composed of a metallic electrode, a dieleetrie and a semiconductor layer. Voltage switching at the gate generates either no current flow or current flow between the source and drain terminals this corresponds to a sequence of 0 and 1 bits in the binary system. Transistors with MOSFET stmcture are the most commonly used active components of DRAMs (dynamic random access memories) in computers and intelligent cards...
One remarkable example of a discontinuity-related effect is the interfacial spike in the conduction band edge, shown in Figure 3.22. The wider gap AlAs is doped n-type in this case. Enough electrons flow into the GaAs that near the heterojunction it is made so n-type that it becomes a metal. With careful design, this metallic layer can be rendered very thin such that the electrons find it very hard to move perpendicular to the heterojrmction. In other words, the potential traps them adjacent to the interface. Because they are free to move randomly in this plane and have a moderate to high concentration they are referred to as a two-dimensional electron gas. Because their motion is restricted, it is more difficult for them to scatter since they must remain in the interface plane. The consequence is that the electrons in the interface have a higher mobility than electrons in the bulk semiconductor. [Pg.109]


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