Laser assisted etching

Koker L, Kolasinski KW (2001) Laser-assisted formation of porous silicon in diverse fluoride solutions reactions kinetics and mechanistic implications. J Phys Chem B 105 3864-3871 Kolasinski KW (2010) Charge transfer and nanostructure formation during electroless etching of silicon. J Phys Chem C 114 22098-22105... 

Chen WY, Huang JT, Cheng YC, Chien CC, Tsao CW (2011) Fabrication of nanostructured silicon by metal-assisted etching and its elTects on matrix-free laser desorption/ionization mass spectrometry. Anal Chim Acta 687 97-104... 

Yamamoto N, Takai H (2001) Formation mechanism of silicon based luminescence material using a photo ehemieal etching method. Thin Solid Films 388 138-142 Zhang Z, Lemer MM, Alekel T 111, Keszler DA (1993) Formation of a photoluminescent surface on n-Si by irradiation without an externally applied potential. J Eleetroehem Soc 140 L97-L98 Zheng HY, Chai JC, Lam YC, Zhu H (2005) Formation of porous struetures on Si surface by laser-assisted etehing. Surf Rev Lett 12 351-354... 

Laser-based etching has been used to define feamres by ablation process. It is particularly useful for polymers, dielectrics, metals, and semiconductors. Examples of laser-assisted chemical etching and laser ablation include patterning of polyimide and thin metal films [42]. 

Anodic Etching Chemical Stain Etching Chemical Vapor Etching Laser-Induced Etching Metal-Assisted Etching Spark Processing Reactive Ion (Plasma) Etching... 

Laser beams can also be used to drive chemical reactions in a technique known as laser-assisted chemical etching. Much higher local etch rates can be achieved with this method than are possible with RIE. Similarly, a laser beam can supply energy to drive a deposition the method is called laser-driven deposition. An example is depositing W onto specific areas of a substrate from tungsten hexacarbonyl [W(CO)J. Laser-assisted processes can be used to create interesting three-dimensional structures. However, the processes are intrinsically serial, not parallel, meaning that a beam must be scanned across the areas to be processed spot by spot instead of simultaneously. 

Discusses many microfabrication techniques, including deposition, photolithography, etching, annealing, liquid-phase photopolymerization, micromolding, electroplating, laser-assisted processes, and more... 

Inorganic Thin Coating Filins. One of the photo-assisted approaches for micropatteming of sol-gel derived films is based on the use of laser light to thermally density local regions in the films. The undensified regions can be etched away to produce surface features. 

The authors are grateful to D.A. Koehler and F.D. Curry for assistance with laser ablation experiments and etch depth measurements, D.L. Dittrich for film preparation, L.P. Wilding for performing dielectric constant measurements and Dr. S.L. Buchwalter for helpful discussions. 

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